Keyence LS-9030D User Manual download pdf (Page 4)

E LS-9006D/LS-9030D

Characteristics

■ Measurement range and accuracy

zLS-9006D

* Zero point is the intersection of the optical center of each X and Y axis

measurement range.

zLS-9030D

* Zero point is the intersection of the optical center of each X and Y axis

measurement range.

■ Temperature characteristics

The following shows the typical examples of the temperature characteristics.

zLS-9006/LS-9006M/LS-9006D (X-axis, Y-axis)

Unit: μm

*When a φ1 round bar is measured in the center of the measurement area

(20 ºC as reference)

zLS-9030/LS-9030M/LS-9030D (X-axis, Y-axis)

Unit: μm

*When a φ10 round bar is measured in the center of the measurement

area (20 ºC as reference)

Zero point

180

±1.5

±0.5

Y-axis head

receiver

X-axis head

receiver

±0.5

X-axis

measurement area

Y-axis

measurement area

Unit: mm

Temperature 0°C 10°C 20°C 30°C 40°C 50°C

Drift

0.18

0.06 0.00 0.08 0.12 0.19

Temperature 0°C 10°C 20°C 30°C 40°C 50°C

Drift 0.28 0.14 0.00

0.07

0.25

0.4

200

145

±0.5

±5

±2

Zero point

Y-axis head

receiver

X-axis head

receiver

X-axis

measurement area

Y-axis

measurement area

Unit: mm

1 2 3 4 5 6

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Keyence LS-9030D User Manual Page 4

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